한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1996년도 제10회 학술발표회 논문개요집
- /
- Pages.43-44
- /
- 1996
Preparation and Charaterization of DLC Films n Si-wafer using Organic Compounds by PECVD
- Chun, Min-Seoun (Department of Chemistry, Kyungppook National University) ;
- Jee, Jong-Gi (Department of Chemistry, Kyungppook National University)
- 발행 : 1996.02.01