Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Preparation and Charaterization of DLC Films n Si-wafer using Organic Compounds by PECVD

  • Chun, Min-Seoun (Department of Chemistry, Kyungppook National University) ;
  • Jee, Jong-Gi (Department of Chemistry, Kyungppook National University)
  • Published : 1996.02.01
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