Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.38-39
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- 1996
3단계 식각법을 이용한 SIMOX SOI의 결함분석
- Gang, Hui-Seong (Dept. of Electronic Electrical Engineering, Pohang University of Science and Technology) ;
- An, Chang-Geun (Dept. of Electronic Electrical Engineering, Pohang University of Science and Technology) ;
- Gwon, Yeong-Gyu (Dept. of Electronic Electrical Engineering, Pohang University of Science and Technology) ;
- Bae, Yeong-Ho (Research Institute of Industrial Science and Technology) ;
- Kim, Gwang-Il (Research Institute of Industrial Science and Technology) ;
- Jeong, Uk-Jin (Research Institute of Industrial Science and Technology) ;
- Lee, Gwang-Cheol (Research Institute of Industrial Science and Technology)
- 강희성 (포항공과대학교 전자전기공학과) ;
- 안창근 (포항공과대학교 전자전기공학과) ;
- 권영규 (포항공과대학교 전자전기공학과) ;
- 배영호 (산업과학기술연구소 자동화부문) ;
- 김광일 (산업과학기술연구소 자동화부문) ;
- 정욱진 (산업과학기술연구소 자동화부문) ;
- 이광철 (산업과학기술연구소 자동화부문)
- Published : 1996.02.01
Abstract
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