한국결정성장학회:학술대회논문집 (Proceedings of the Korea Association of Crystal Growth Conference)

한국결정성장학회 (The Korea Association of Crystal Growth)
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Effects of Oxygen Partial Pressure in Cooling after Deposition of PZT Thin Films by Reactive Sputtering

  • Lee, H.S. (KAITECH, KTL, Material Testing Team) ;
  • Um, W.S. (KAITECH, KTL, Material Testing Team) ;
  • Lee, I.S. (KAITECH, KTL, Material Testing Team) ;
  • Orr, K.H. (Dept. of Inorganic materials Engineering, Hanyang University)
  • 발행 : 1996.06.01
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