Proceedings of the Korea Association of Crystal Growth Conference (한국결정성장학회:학술대회논문집)
- 1996.06a
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- Pages.88-138
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- 1996
Issue of Large Diameter Si Wafer Making
Abstract
Electronics grew up to the largest industry in the world supported by Si wafer. In near future, the Si wafer may use 300mm in diameter for economic requirement. This size wafer may use to produce large logic chip, 256Mbit DRAM, and other large complex and high density chip. Then, the quality including flatness and crustal characters may be required very high performance. And, their price should be reasonable and high quantity may be required. These requirements should be solve lot of hard problems of crystal growth, wafering mechanical processing and their cost problems. In this presentation, I may discuss following items.
Keywords