Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Surface-micromachined Tunable Microgyroscope

주파수 조정가능한 박막미세가공 마이크로 자이로

  • Lee, Ki-Bang (Department of Mechanical Engineering, Korea Advanced Institute of science and Technology) ;
  • Yoon, Jun-Bo (Department of Electrical Engineering, Korea Advanced Institute of science and Technology) ;
  • Kang, Myung-Seok (Department of Mechanical Engineering, Korea Advanced Institute of science and Technology) ;
  • Cho, Young-Ho (Department of Mechanical Engineering, Korea Advanced Institute of science and Technology) ;
  • Youn, Sung-Kie (Department of Mechanical Engineering, Korea Advanced Institute of science and Technology) ;
  • Kim, Choong-Ki (Department of Electrical Engineering, Korea Advanced Institute of science and Technology)
  • 이기방 (한국과학기술원 기계공학과) ;
  • 윤준보 (한국과학기술원 전기 및 전자공학과) ;
  • 강명석 (한국과학기술원 기계공학과) ;
  • 조영호 (한국과학기술원 기계공학과) ;
  • 윤성기 (한국과학기술원 기계공학과) ;
  • 김충기 (한국과학기술원 전기 및 전자공학과)
  • Published : 1996.07.22
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Abstract

We investigate a surface-micromachined polysilicon microgyroscope, whose resonant frequencies are electrostatically-tunable after fabrication. The microgyroscope with two oscillation nudes has been designed so that the resonant frequency in the sensing mode is higher than that in the actuating mode. The microgyroscope has been fabricated by a 4-mask surface-micrormachining process, including the deep RIE of a $6{\mu}m$-thick LPCVD polycrystalline silicon layer. The resonant frequency in the sensing mode has been lowered to that in actuating mode through the adjustment of an inter-plate bias voltage; thereby achieving a frequency matching at 5.8kHz under the bias voltage of 2V in a reduced pressure of 0.1torr. For an input angular rate of $50^{\circ}/sec$, an output signal of 20mV has been measured from the tuned microgyroscope under an AC drive voltage of 2V with a DC bias voltage of 3V.

Keywords