대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1996년도 하계학술대회 논문집 C
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- Pages.1957-1959
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- 1996
압전 구동기를 이용한 마이크로 펌프의 제작
Fabrication of a Micropump using Piezoelectric Actuator
- Ji, Y.H. (School of Electrical and Electronic Engineering, AJOU University) ;
- Yang, S.S. (School of Electrical and Electronic Engineering, AJOU University)
- 발행 : 1996.07.22
초록
In this paper, a piezoelectric micropump is fabricated and tested. The micropump consists of an actuator and two micronozzles have been made of silicon. It contains a piezoelectric polymer which allows opening and closing of the valves electrically. The actuator and the two micronozzles are fabricated by the anisotropic etch using EPW. Then, the fabricated actuator and the valves are anodically bonded with the pyrex glass which consists of the inlet and the outlet channels. The measured deflection of the piezoelectric polymer is
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