Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Measurement of Optical Properties of Micromirror

마이크로 미러의 광학적 특성 측정

  • Kim, Do-Hyeong (Department of Electrical Engineering, Chung-ang University) ;
  • Kim, Ho-Seong (Department of Electrical Engineering, Chung-ang University)
  • Published : 1996.07.22
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Abstract

In this paper, we measured the reflectance of the $100{\mu}m{\times}100{\mu}m$ micromirror. In order to reduce the size of the HeNe laser beam, an eyepiece and an objective lens were used. CCD camera was used to the monitor the position and focusing. It was found that the diameter of the focused laser beam was about $3{\mu}m$. The reflectance of the reflectance of the micromirror was over the surface and 87% of the commercial mirror.

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