Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1996.07c
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- Pages.1648-1650
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- 1996
Fabrication of Copper Films by RF Magnetron Sputtering
스퍼터링법에 의한 Cu막 형성 기술
- Kim, Hyun-Sik (Dept. of Inorgnic Materials Eng., Kyungnam Univ.) ;
- Song, Jae-Sung (KERI) ;
- Jeong, Soon-Jong (KERI) ;
- Oh, Young-Woo (Dept. of Inorgnic Materials Eng., Kyungnam Univ.)
- Published : 1996.07.22
Abstract
In present paper, Cu films
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