Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1995.11a
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- Pages.76-76
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- 1995
The characteristics of the PLT thin films prepared by ECR enhanced multi-target sputtering method
ECR enhanced multi-target sputtering 방법으로 제조된 PLT 박막의 특성
Abstract
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