Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1995.11a
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- Pages.41-41
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- 1995
Thermal Stability of Molybdenum Nitride Thin Film as a Copper Diffusion Barrier
구리확산방지막으로서 Molybdenum Nitride 박막의 열적안정성 연구
Abstract
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