Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1995.11a
- /
- Pages.328-331
- /
- 1995
Hygroscopic Characteristics of TiO$_2$ Thin Films Deposited by R.F Sputter
R.F 스퍼트링에 의한 TiO$_2$ 박막의 감습특성
Abstract
TiO
Keywords