한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

박막 다이아몬드 필름의 후처리 공정법에 대한 고찰

Review on Post-Processing of Diamond Thin Film Semiconductor

  • 발행 : 1995.11.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper reviewed the methods about cost-processing of diamond stone and thin film. Five different crises of annealing conditions have been discussed with the electrical properties of doping and implantation.

키워드