한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1995년도 추계학술대회 논문집
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- Pages.139-142
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- 1995
VDPM을 이용한 PMBA/4,4-DDE polyimide의 제작과 전기적특성
Fabrication and Electric characteristics of PMDA/4,4-DDE Polyimide by Vapor Deposition Polymerization(VDP) Method
초록
Polyimide(PI) thin films are fabricated by vapor deposition polymerization(VDP) from PMDA and DDE. The IR spectrum show that PAA the films are changed into PI films by curing. The activation energy of PI films is estimated to be 0.32 [eV] at the electric field of 0.133 [Mv/cm]. The resistivity is about 4.5
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