Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Preparation and Characterization of Epitaxial $YBa_2Cu_3O_{7-\delta}$ Thin Films for Fabrication of High-$T_{c}$ Superconducting Microwave Devices

마이크로파 소자 응용을 위한 고온초전도 $YBa_2Cu_3O_{7-\delta}$ 에피택셜 박막의 제조 및 특성분석

  • 강광용 (한국전자통신연구소 기초기술연구부) ;
  • 한석길 (한국전자통신연구소 기초기술연구부) ;
  • 김제하 (한국전자통신연구소 기초기술연구부) ;
  • 이상렬 (한국전자통신연구소 기초기술연구부)
  • Published : 1995.05.01
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Abstract

We describe the preparation and characterization of epitaxial thin films made with high temperature superconductor, $YBa_2Cu_3O_{7-\delta}$. The influence of processing parameters for YBCO thin films on MgO substrates in-situ grown by the pulsed laser deposition, including parameters of a laser beam energy, oxygen pressure, substrate temperature, target-substrate dis-tance is discussed. The characteristics of YBCO thin films were analyzed by using XRD, R-T measurement, AFM, crosssectional TEM, and RBS. For examples of microwave device applications, The fabrication and characterization of the microstrip lowpass filter and bandpass filter are also presented.

Keywords