한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1995년도 추계학술대회 논문집
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- Pages.89-93
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- 1995
스퍼터링 및 저압화학기상증착 비정질 실리곤 박막의 고상 결정화 특성
Characterization of Solid Phase Crystallization in Sputtered and LFCVD Amorphous Silicon Thin Film
초록
Effects of hydrogenation in amorphous silicon rile growths on Solid Phase Crystallization (SPC) was investigated using x-ray diffractometry, energy dispersive Spectroscopy, and Raman spectrum. Interdiffusion of barium(Ba) and aluminum(Al) compounds of corning substrate was observed in both of rf sputtering and LFCVD films under the low temperature(580
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