한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1995년도 추계학술대회 논문집
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- Pages.63-66
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- 1995
Au-Te 과 n-GaAs 의 접촉저항 특성
The characteristics of the specific contact resistance of Au-Te to n-GaAs
초록
The ohmic characterization of Au/Te/Au/n-GaAs structure is investigated by the application of x-ray diffraction, scanning electron microscopy, Auger electron spectroscopy, the specific contact resistance and I-V measurement. Increasing the annealing temperature, the results of XRD measurement show the sharpening of the Au-Ga peak and the increasing of the intensity of Au peak due to the crystallization. At 400
키워드