Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
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- Pages.153-153
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- 1995
Formation and Growth of Cu Nanocrystalite in Si(100) by Ion Implantation
- Kim, H.K. (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
- Kim, S.H. (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
- Moon, D.W. (Surface Analysis Groupp, Korea Research Institute of Standards and Science)
- Published : 1995.06.01
Abstract
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