Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
- /
- Pages.141-141
- /
- 1995
Double layer $TiB_2$ -TiN Films
- LizhiChen (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- YunjieYang (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- ZhihongZheng (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- XiWang (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- XianghuaiLiu (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- Han, J.G. (plasma Applied Materials Laboratory, Sung Kyun Kwan University) ;
- Yoon, J.S. (plasma Applied Materials Laboratory, Sung Kyun Kwan University)
- Published : 1995.06.01
Abstract
Keywords