Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
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- Pages.128-128
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- 1995
Role of Oxygen in the Angular Distribution of Sputtered Constituents from Fe/Cr Alloy studied by laser SNMS
- Im, Hoong-Sun (Surface Analysis Groupp, Korea Res. Inst. of Standards and Science) ;
- Ichimura (Surface Engineering Section, Electrotechnical Laboratory)
- Published : 1995.06.01
Abstract
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