한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)

한국진공학회 (The Korean Vacuum Society)
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Oxygen Ion Beam Induced Abnormal Topographic Development at the Ta/Si Interface Studied by SIMS, XPS, and AFM

  • Kim, K.J (Surface Analysis Groupp, Korea Res. Inst. of Standards and Science) ;
  • Moon, D.W (Surface Analysis Groupp, Korea Res. Inst. of Standards and Science) ;
  • Jeon, I.C. (Dept.of Chemical, Chonbuk National University)
  • 발행 : 1995.06.01
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