Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
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- Pages.89-89
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- 1995
Structural property of Cu thin films grown by Ionized cluster beam deposition
- Yoon, Y.S. (Division of Ceramics, Korea Institute of Science and Technology) ;
- Kim, K.H. (Division of Ceramics, Korea Institute of Science and Technology) ;
- Jung, H.J. (Division of Ceramics, Korea Institute of Science and Technology) ;
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Koh, S.K.
(Division of Ceramics, Korea Institute of Science and Technology)
- Published : 1995.06.01
Abstract
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