한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1995년도 제9회 학술발표회 논문개요집
- /
- Pages.51-51
- /
- 1995
Growth and Characterization of $Ta_2O_5$ Thin Films on Si by Ion Beam Sputter Deposition
- Park, K.S. (Dep. of Mat. Sci. & Eng. Korea University) ;
- Lee, D.Y. (Dep. of Mat. Sci. & Eng. Korea University) ;
- Kim, K.J. (Surface Analysis Group, Korea Res. Inst. of Standards and Science) ;
- Moon, D.W. (Surface Analysis Group, Korea Res. Inst. of Standards and Science)
- 발행 : 1995.06.01