Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Growth and Characterization of $Ta_2O_5$ Thin Films on Si by Ion Beam Sputter Deposition

  • Park, K.S. (Dep. of Mat. Sci. & Eng. Korea University) ;
  • Lee, D.Y. (Dep. of Mat. Sci. & Eng. Korea University) ;
  • Kim, K.J. (Surface Analysis Group, Korea Res. Inst. of Standards and Science) ;
  • Moon, D.W. (Surface Analysis Group, Korea Res. Inst. of Standards and Science)
  • Published : 1995.06.01
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