한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1995년도 제9회 학술발표회 논문개요집
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- Pages.20-21
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- 1995
Surface Roughness and Defect Morphology in Low Temperature Electron Cyclotron Resonance Hydrogen Plasma Cleaned (100) Silicon
- Hwang, Ki-Hyun (Dept. of Inorganic Materials Engineering) ;
- Yoon, Eui-Joon (Dept. of Inorganic Materials Engineering) ;
- Whang, Ki-Woong (Dept. of Electrical Engineering)
- 발행 : 1995.06.01