Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Tin Oxide Thin Film Deposition for Gas S두낵 by Reactive Ionized Cluster Beam(R-ICB)

  • Choi, Won-Kook (Ceramics Division, Korea Institute of Science and Technology) ;
  • Song, Seok-Kyun (Ceramics Division, Korea Institute of Science and Technology) ;
  • Jung, Hyung-Jin (Ceramics Division, Korea Institute of Science and Technology) ;
  • Koh, Seok-Keun (Ceramics Division, Korea Institute of Science and Technology)
  • Published : 1995.02.01
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