한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1995년도 제8회 학술발표회 논문개요집
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- Pages.071-72
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- 1995
이온 클러스터빔에 의한 구리박막 제작
Deposition of Coper Thin Film by Ionized Cluster Beam(ICB)
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Choi, Won-Kook
(Ceramics Division, Korea Institute of Science and Technology)
;
- Kim, Ki-Han (Ceramics Division, Korea Institute of Science and Technology) ;
- Yoon, Young-Soo (Ceramics Division, Korea Institute of Science and Technology) ;
- Jung, Hyung-Jin (Ceramics Division, Korea Institute of Science and Technology) ;
- Lee, Jiyun (Ceramics Division, Korea Institute of Science and Technology) ;
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Koh, Seok-Keun
(Ceramics Division, Korea Institute of Science and Technology)
- 발행 : 1995.02.01