Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.02a
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- Pages.071-72
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- 1995
Deposition of Coper Thin Film by Ionized Cluster Beam(ICB)
이온 클러스터빔에 의한 구리박막 제작
-
Choi, Won-Kook
(Ceramics Division, Korea Institute of Science and Technology)
;
- Kim, Ki-Han (Ceramics Division, Korea Institute of Science and Technology) ;
- Yoon, Young-Soo (Ceramics Division, Korea Institute of Science and Technology) ;
- Jung, Hyung-Jin (Ceramics Division, Korea Institute of Science and Technology) ;
- Lee, Jiyun (Ceramics Division, Korea Institute of Science and Technology) ;
-
Koh, Seok-Keun
(Ceramics Division, Korea Institute of Science and Technology)
- Published : 1995.02.01
Abstract
Keywords