위상이동 그림자 무아레방법에서 형상측정 정확도의 개선

Improvement of accuracy of surface measurement in the phase-shifting shadow moire method

The shadow moire is one the optical techniques which able to give contour lines of an object with respect to a master grating plane. The moire patterns are issued from the superposition of a grating and its shadow projected on the surface of an object. But in the conventional shadow moire method the reference grating and deformed grating are mutually dependent, it is impossible to obtain uniform phase shifts on the whole field by moving the reference grating. Here we propose ane trial to apply phase shifting to conventional shadow moire. When, in the conventional arrangement, Phase-shifting that is sctually constant regardless of fringe orders is achieved by moving the grating and the light source. Finally we obtained a better result by using this procedure and applied the phase shifting shadow moire to three dimensional measurement.