Development of X-Y table with LPM and its user's interface

LPM을 이용한 X-Y table과 사용자 interface의 개발

LPM(Linear pulse motor) was developed as a prototype. In this paper, the design results of prototype and its dynamic characteristics are shown. The prototype was designed by using permeance analysis and the thrust value was also confirmed by comparing with the analysis results of the finite element method. To verify the performance of LPM. dynamic characteristics were measured. In slewing characteristic of the LPM, the thrust value of prototype LPM is higher than commercial level. A X-Y table was structured as a application of the prototype LPM. A controller and user's interface was also developed. By using this control system, the position error of X-Y table was checked. The repeat position error in linear movement was under than ${\pm}$ 100 micron.