대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

원자력 발전용 냉각수 파이프 내부 보호막 코팅기술의 개발에 관한 기초연구

A Study on the Pipe Inner Coating by Plasma Processing

  • 성열문 (부산대학교 공과대학 전기공학과) ;
  • 박희갑 (부산대학교 공과대학 전기공학과) ;
  • 김규섭 (부산대학교 공과대학 전기공학과) ;
  • 신중홍 (동의대학교 전기공학과) ;
  • 조정수 (부산대학교 공과대학 전기공학과) ;
  • 박정후 (부산대학교 공과대학 전기공학과)
  • Sung, Y.M. (Department of Electrical Engineering, Pusan National University) ;
  • Park, H.K. (Department of Electrical Engineering, Pusan National University) ;
  • Kim, G.S. (Department of Electrical Engineering, Pusan National University) ;
  • Shin, J.H. (Department of Electrical Engineering, Dong Eui University) ;
  • Cho, J.S. (Department of Electrical Engineering, Pusan National University) ;
  • Park, C.H. (Department of Electrical Engineering, Pusan National University)
  • 발행 : 1995.07.20
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초록

A cylindrical-post magnetron sputtering system was designed for pipe inner coating. The discharge condition was depended on the gas pressure, magnetic field and pipe diameter. At given discharge current, discharge voltage increased a little with pipe diameter. The electron temperature and floating potential increased with magnetic field. The impact ion energy on the pipe increased with bias voltage. The TiN thin-film of $2{\mu}m$ thickness was formed by cylindrical-post magnetron sputtering system under the conditions of the pressure of 5mTorr, the applied voltage of 700V, the discharge current of 500mA, the magnetic field of 300G, and the bias voltage of -100V.

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