Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.11a
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- Pages.39-39
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- 1994
Deposition of LPCVD $a-Si_{1-x}Ge_{x}$ alloy films using $Si_{2}H-{6}$ and $GeH_4$ and its soid phase crystallization behaviors
$Si_{2}H-{6}$ 과 $GeH_4$ 가스를 이용한 LPCVD $a-Si_{1-x}Ge_{x}$ 박막증착과 고상결정화 거동
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