Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.11a
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- Pages.37-38
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- 1994
Low-temporature heteroepitaxial growth of $Si_{1-x}Ge_{x}$ using Ultrahigh Vacuum - Eledtron Cyclotron Resonance Chemical Vapor Deposition
초고진공 전자공명 화학기상증착법을 이용한 $Si_{1-x}Ge_{x}$ 박막의 저온에피성장
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