Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.11a
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- Pages.27-27
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- 1994
A Study on the Formation and Properties of $RuO_2$ Thin Films by RF magnetron Sputtering
RF magnetron sputtering 법에 의한 $RuO_2$ 박막의 제조와 물성에 관한 연구
Abstract
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