Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on the Characteristics of Discharge and AIN Thin Film for Variation of Wings Diameter in FTS System

FTS 시스템에서 윙의 변화에 따른 방전 및 AIN 박막특성에 관한 연구

  • Published : 1994.11.01

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Abstract

In this Paper, we had investigated the optimal discharge condition (parameters of this experiment) in Facing Targets Sputtering System and AIN thin film. The parameters of this study are diameter of wing and electrode distance between two facing targets. If the parameters are varied, the discharge characteristics will be varied. So, we proved the optimal parameters of this experiment. Under this optimal parameter, thin film formed, and then growth rate investigated.

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