한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1994년도 춘계학술대회 논문집
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- Pages.71-73
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- 1994
대향전극 스파트링 시스템의 방전특성과 $Al_{N}$ 박막형성에 관한 연구
A study on the Discharge Characteristics of Facing Targets Sputtering Systems and Fabrications of $Al_{N}$ Thin Films
초록
In this paper we have investigated discharge conditions(parameters of this experiment) in facing targets sputtering system and fabricated
키워드