한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1994년도 제7회 학술발표회 및 한·일 CVD 심포지움 논문개요집
- /
- Pages.158.2-158
- /
- 1994
Vacuum SR Lithograpphy with Using pplasma ppolymerized Organo-silicon Resist
- Shinzo-Morita (Center of Co-opperative Research on Advanced Science and Technology Nagoya University) ;
- Geo (Center of Co-opperative Research on Advanced Science and Technology Nagoya University)
- 발행 : 1994.06.01