Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.02a
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- Pages.23-23
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- 1994
Down-Sizing Clean and Dry Turbomolecular Pumping
진공분과 초청발표
- Ormrod, S.E. (Edwards High Wacuum International, Crawley,UK) ;
- Schofield, N. (Edwards High Wacuum International, Crawley,UK) ;
- Wong, D.C. (Edwards High Wacuum International, Crawley,UK)
- Published : 1994.02.01
Abstract
Keywords