Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.02a
- /
- Pages.11-12
- /
- 1994
Applications of the $TiSi_2$ fiom to ULSI devides
$TiSi_2$ 박막의 ULSI소장에의 응용
Abstract
Keywords