Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.06a
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- Pages.160-161
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- 1994
PREPARATION OF CERAMIC THIN FILMS BY PLASMA-ENHANCED MOCVD
- Hirao, Takashi (Central Research Laboratory, Matsushita Electric Industrial Co., Ltd.)
- Published : 1994.06.01
Abstract
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