한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1994년도 제6회 학술발표회 논문개요집
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- Pages.98-101
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- 1994
Synthesis of White Diamond Thin Film by Microwave Plasma Enhanced Chemical Vapor Deposition Method
- Kim, S.H. (New Materials Laboratory, Samsung Advanced Institute of Technology) ;
- Y.S.ppark (New Materials Laboratory, Samsung Advanced Institute of Technology) ;
- Lee, J-W. (New Materials Laboratory, Samsung Advanced Institute of Technology) ;
- Song, S.A. (New Materials Laboratory, Samsung Advanced Institute of Technology)
- 발행 : 1994.02.01
초록
white diamond thin film, which should be compposed of almost ppure diamond, could be successfully obtained under high ppressure conditions(above 150 Torr) by means of MppECVD(microwave pplasma enhanced chemical vappor depposition, ASTeX 1.5 kW). Characteristics of the films with varing expperimental pparameters have been examined. From the expperimental results, we will discuss the surface morpphology and the growth mechanism of the films.
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