한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1994년도 제6회 학술발표회 논문개요집
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- Pages.93-95
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- 1994
The Growth of Cubic SiC Films by OMCVD Using Single Molecular Precursors
- Jin-Hyo Boo (Inorganic Materials Division Korea Research Institute of Chemical Technology) ;
- Kyu-Sang Yu (Inorganic Materials Division Korea Research Institute of Chemical Technology) ;
- Moonhee Lee (Inorganic Materials Division Korea Research Institute of Chemical Technology) ;
- Yunsoo Kim (Inorganic Materials Division Korea Research Institute of Chemical Technology)
- 발행 : 1994.02.01