The Effect of concurrent Ion Bombardment on the Surface Morpphology of Thin Films Grown by In Beam Assisted Deposition

  • Ki Seon ppark (Korea University, Deppartment of Material Engineering) ;
  • Kyung Joong Kim (Korea Research Institute of Standards and Science, Surface Analysis Groupp) ;
  • In Chul Jhon (Jhunbuk University, Deppartment of Chemistry) ;
  • Dokyol Lee (Korea University, Deppartment of Material Engineering) ;
  • Dae Won Moon (Korea Research Institute of Standards and Science, Surface Analysis Groupp)
  • Published : 1994.02.01