Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07b
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- Pages.1493-1495
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- 1994
A Study on the effect of hydrogen flow rate and $CH_4$ concentration in deposition of the diamond thin films by MWPECVD
MWPECVD법에 의한 Diamond합성에 있어서 수소류양과 메탄농도의 영향
- Cho, J.K. (Dept. of Elec. Eng. kyung-nam univ.) ;
- Park, S.T. (Dept. of Elec. Eng. kyung-nam univ.) ;
- Park, S.H. (Dept. of Elec. Eng. kyung-nam univ.) ;
- Geun, H.K. (Dept. of Elec. Eng. kyung-nam univ.) ;
- Park, J.C. (Dept. of Electronics Yeung-Jin Junior College)
- Published : 1994.07.21
Abstract
Study on the effect of hydrogen flow rate and
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