한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

미세구조 $TiO_2$계 습도센서의 특성

Characteristics of Fine Structure $TiO_2$-based Humidity Sensors

  • Rim, J.Y. (Dept. of Electronics, Kyungnam University) ;
  • Yun, Y.K. (Dept. of Electronics, Kyungnam University) ;
  • Lee, S.P. (Dept. of Electronics, Kyungnam University) ;
  • Ko, S.T. (Dept. of Electronics, Jaeju University)
  • 발행 : 1993.05.15
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

$TiO_2-V_2O_5-Nb_2O_5$ humidity sensors have been fabricated in the ceramic type and their physical and hygroscopic characteristics have been investigated. The additives and sintering conditions affect the humidity sensitivity. XRD patterns, SEM photographs were used for the analysis of crystal structures and surface morphology. $TiO_2-V_2O_5-Nb_2O_5$ humidity sensors had good linearity in the range from 20%RH to 90%RH and the sensitivity of sensor sintered at $1,000^{\circ}C$ for 1hr was 73% at operating temperature $60^{\circ}C$.

키워드