Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Characteristics of Fine Structure $TiO_2$-based Humidity Sensors

미세구조 $TiO_2$계 습도센서의 특성

  • Rim, J.Y. (Dept. of Electronics, Kyungnam University) ;
  • Yun, Y.K. (Dept. of Electronics, Kyungnam University) ;
  • Lee, S.P. (Dept. of Electronics, Kyungnam University) ;
  • Ko, S.T. (Dept. of Electronics, Jaeju University)
  • Published : 1993.05.15
Download PDF
⟨ Previous Next ⟩

Abstract

$TiO_2-V_2O_5-Nb_2O_5$ humidity sensors have been fabricated in the ceramic type and their physical and hygroscopic characteristics have been investigated. The additives and sintering conditions affect the humidity sensitivity. XRD patterns, SEM photographs were used for the analysis of crystal structures and surface morphology. $TiO_2-V_2O_5-Nb_2O_5$ humidity sensors had good linearity in the range from 20%RH to 90%RH and the sensitivity of sensor sintered at $1,000^{\circ}C$ for 1hr was 73% at operating temperature $60^{\circ}C$.

Keywords