Characteristics of Fine Structure $TiO_2$-based Humidity Sensors

미세구조 $TiO_2$계 습도센서의 특성

  • Rim, J.Y. (Dept. of Electronics, Kyungnam University) ;
  • Yun, Y.K. (Dept. of Electronics, Kyungnam University) ;
  • Lee, S.P. (Dept. of Electronics, Kyungnam University) ;
  • Ko, S.T. (Dept. of Electronics, Jaeju University)
  • Published : 1993.05.15

Abstract

$TiO_2-V_2O_5-Nb_2O_5$ humidity sensors have been fabricated in the ceramic type and their physical and hygroscopic characteristics have been investigated. The additives and sintering conditions affect the humidity sensitivity. XRD patterns, SEM photographs were used for the analysis of crystal structures and surface morphology. $TiO_2-V_2O_5-Nb_2O_5$ humidity sensors had good linearity in the range from 20%RH to 90%RH and the sensitivity of sensor sintered at $1,000^{\circ}C$ for 1hr was 73% at operating temperature $60^{\circ}C$.

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