$2{\times}2$ 방향성 결합형 광 변조기의 제작 연구

Fabrication of electro-optical modulator of directional coupler $2{\times}2$

A guided - wave electro - optical modulatored directional coupler $2{\times}2$ was fabricated on X-cut $LiNbO_3$ by proton exchange wi th self-aligned method. The Electode pattern was formed by the four extra gap electrode separtion within self-aligned electrode mask. Initial cross over state turned that by controlling the anneal ing process and self-aligned electrodes are used in fabricating the electro-optical modulatored directional coupler $2{\times}2$. The modulatored directional coupler $2{\times}2$ has very good figures of merits: the measured crosstalk was -28.2 dB and the modulating valtage of 3.2[V].