Si 기판위 GaAs 성장에 대한 TEM 연구

A TEM study on GaAs film on Si substrate

  • Sahn Nahm (Electrontcs Telecommunication Research Institute, Daedog Science Town,) ;
  • Hee Tae Lee (Electrontcs Telecommunication Research Institute, Daedog Science Town,) ;
  • Kyoung Ik Cho (Electrontcs Telecommunication Research Institute, Daedog Science Town,)
  • 발행 : 1993.05.01