Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1993.11a
- /
- Pages.86-86
- /
- 1993
The Effect of Deposition Temperature on the Interfacial Properties of $SiN_4$ Reduced Blanket Tungsten on TiN Glue Layer
TiN glue layer위에 증탁되는 $SiN_4$ 환원 Blanket 텅스텐의 증착온도가 계면성질에 미치는 영향
Abstract
Keywords