한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1993년도 제4회 학술발표회 논문개요집
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- Pages.6-6
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- 1993
RECENT DEVELOppMENTS IN STUDIES ON DIAMOND FILMS BY ppLASMA CVD FOR FUTURE ELECTRONIC DEVICES
초록
With brief instroduction of fabrication methods of dia.ond fillls by plasma CVD, recent progress in diamond research mainly done in the author's laboratory at Osaka University is reviewed.especially on the following topics: "low temperature diallond fabrication", "ion implantation", "hydrogen plasma treatment of ion-implanted diaaond to remove ion-induced damage", "Oxygen diffusion into the bulk assisted by the hydrogen treatllent", and "hole-burning effect".ffect".
키워드